Computer Science | Applied Mathematics Internship: Calibration Data Analysis

Job Description:

Introduction
The Image Alignment EUV group is a collaborative team of metrology specialists who work together to achieve highly accurate alignment of patterns from reticle to wafer. We study machine behavior in detail and translate our insights into models and measurement sequences that run in the scanner software. Our work spans all EUV systems operating in the field today as well as the next-generation platforms, creating a dynamic and forward-looking environment.

Our team develops and maintains several calibration actions that keep the scanner performing at its best. These actions complement each other to position the reticle in the optimal object plane and the wafer in the optimal image plane, ensuring every pattern is projected precisely onto the correct location on the silicon wafer. We derive corrections to stage and lens positions from sequences of sensor measurements and model the misalignments detected, accounting for effects such as thermal drift and system behavior over time.

Your assignment
You will explore population data from EUV systems to reveal how multiple calibration actions relate to one another. You will help extend existing dashboards and analytical tools so the team can better understand scanner behavior and improve image alignment performance. You will also contribute to recommendations that support higher accuracy and stability.
Your main responsibilities will be:
* Analyze population-level data to uncover calibration dependencies.
* Design and implement dashboard extensions that highlight interactions between actions.
* Develop or improve scripts that generate data for visualization.
* Validate your analytical approach with clear, structured testing.
* Summarize findings and propose improvements to scanner behavior.
* Document your methods and results for knowledge transfer.

This is a master's internship for a minimum of 6 months, 4-5 days per week (2 days on-site). The internship is scheduled to start in September 2026, but an earlier start date is possible.

Your profile
To be suitable for the internship, you:
* Are enrolled in a master's degree in statistics, data science, applied physics, engineering, or applied mathematics.
* Have experience programming in MATLAB or Python.
* Understand object-oriented programming principles.
* Can analyze and visualize data using platforms such as Spotfire.
* Are analytical, collaborative, proactive, and comfortable communicating in English.

Other requirements you need to meet:
* You are enrolled at an educational institute for the entire duration of the internship;
* Attach your cover letter with a clear motivation why you are interested in this internship assignment in particular;
* You need to be located in the Netherlands to be perform your internship. In case you are currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate.
* If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).

Inclusion and diversity

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.

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